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PI0213PI (Physik Instrumente) Micos expanded "the LPS series of linear positioning stages. The drive principle of the compact Verstellerserie LPS 45 based on a piezoelectric inertial drive. The linear stage reached in a small space, a combination of power and positioning, which is with conventional linear motors such as DC and stepper motor is not possible. The holding or maximum propulsive force at 10 N, the maximum speed is 10 mm / s

The dimensions of the LPS 45 series are smaller than in systems with comparable force: The width is 45 mm. The length ranges from 48 mm at 13 mm travel to 63 mm at 25 mm travel.

In a compact space containing the LPS 45 precision components such as cross roller bearings with cage creeping, allowing high flow accuracy below 100 μrad. As length measurement system is an optical linear encoder for use. It has a resolution of 1 nm and how the motor is positioned centrally between the guides. In combination with the piezoelectric inertial drive can thus smallest step sizes in the encoder resolution to achieve stable and repeatable.

Due to the high irreversibility of the piezo motor requires position control of the moving little electricity, the engine does not heat up. Operated, the piezoelectric actuator with a voltage of inertia 45 V at a frequency of 23 kHz. He thus operates almost silently.

The position control is designed for fast point-to-point movement. She performed with the motion controller E-871. The control is accessed digitally via a USB or RS-232 interface and has many optional parameters to optimize the transient response. Due to their connectivity, up to 16 axes simultaneously controlled via a computer interface. For laboratory applications support the e-871 controller Labview. Additional libraries for Windows and Linux enable implementation into existing environments.

The drives of the LPS 45 series are suitable for applications with low duty cycles in a confined space. Piezo motors are basically suitable for vacuum and so also the LPS-Positioning for the operation to the ultra-high vacuum with 10-9 hPa designed. Specifically for use in the laboratory and beamline instrumentation builds the manufacturer to its range of positioning systems with piezoelectric motors further. Currently the LPS 45 used in a parallel-FAB ​​Design Space.


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