The Drive unit for a special Vacuum application in the Semiconductor manufacturing consists of an internally toothed stainless steel Ball slewing with the dimensions 1230 mm x 1091 mm x 27,5 mm including mounting plate and drive pinion. Rodriguez delivers this assembly as part of its customer-specific system solutions Value Added Products from a single source.
Thanks to a two-layer clean room packaging, the drive unit meets the strict requirements of the semiconductor industry. "The used special bearings is special because it is actually a bit too thin for a slewing ring. This resulted from the filigree construction of the machine and the weight compliance specified by the customer, ”explains Ulrich Schroth, Head of the Value Added Products division at Rodriguez.
Smallest, light wire race bearing with profiled raceways
“The slewing rings are made of hardenable, corrosion-resistant stainless steel 1.4034 and have hardened tooth flanks that provide increased protection against wear. Ceramic rolling elements allow minimum quantity lubrication with a special vacuum grease. This allows the Storage unit im Ultra high vacuum can be installed without any problems. ”A customer-specific bearing clearance also meets the special requirements of such applications.
The customer-specific slewing ring is made in a two-layer Clean room packaging delivered. Rodriguez applies the first packaging for this in the clean room. This is followed by a second normal packaging. The unpacking of the slewing rings on delivery is done in reverse order.
The uppermost normal packaging is removed and the second packaging is removed at the customer's clean room. This ensures that neither contamination nor foreign objects during transport later have a negative effect on the slewing rings in the application.
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