Owis offers a large portfolio Vacuum Technology from High vacuum (HV), about Ultra high vacuum (UHV) up to extremely high vacuum (XHV). It starts with positioners and optical components in pressure ranges up to 10-6 mbar. In 2017 the company expanded the UHV to 10-9 mbar with new ultra-high vacuum products for a considerable expansion of the possible applications. Last but not least, in the last few years the know-how for XHV products has increased to 10-11 mbar worked out.
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High vacuum HV products
Owis offers a portfolio for high vacuum applications optical beam guidance systems and positioning systems that are used for applications in the 10-6 mbar are designed.
All parts are bare and cleaned and are mounted in the clean room and measured. The blind holes are vented. the Ball Screws Fine-thread spindles and guides were filled with HV grease and are equipped with a V6 Hall effect switch or with mechanical limit or reference switches.
Ultra high vacuum UHV products
In the manufacture of ultra-high vacuum products, attention is paid to compliance with the highest standards. All UHV products are made without brass alloys produced. In addition, only materials in a bare state without a coating are used. To avoid virtual leaks, all blind holes are also vented. The individual parts are carefully cleaned beforehand and then assembled, measured and packaged in the ISO class 5 clean room. This ensures that the products are not contaminated by dirt molecules.
The range of products for ultra-high vacuum production includes almost the entire product range, starting in the area of beam delivery systems, for example System rails and optics holder, to manual and motorized positioners. In order to comply with the limit values, special ultra-high vacuum is used in the motorized variants Engines used. The standard products are delivered without limit or reference switches, but can be equipped with UHV-compatible switches on request.
Planetary gears & strain wave gears precision from Schaeffler
The ultra-high vacuum products must be placed in the vacuum chamber Temperatures around 80 ° C bake out and measured after a heating cycle of a maximum of 12 hours. There is a mass spectrum from 0 to 100 u at a pressure less than 10-7 mbar added. The peak values in the range 45 to 100 u are more than two decades below the highest mass peak of the vacuum in the range 0 to 44 u.
Extremely high vacuum XHV products
The latest achievement is the portfolio in the area of extremely high vacuum XHV. Owis has acquired the appropriate know-how and the necessary skills over the past few years Infrastructure Developed to provide vacuum products for the 10th division-11 to realize mbar.
Be used Nickel-plated aluminum components as well as XHV suitable plastics, Ceramics and fat. Here, too, the blind holes are vented. The XHV suitable Plug are mounted on the motorized table. Limit and reference switches are available on request. Like all other vacuum products, the XHV is also cleaned, measured and assembled in the clean room and delivered securely packaged and double-sealed in foil.